µPhase® 3.1 / 3.2 / 3.3

Hoch flexibelµPhase® 3.1/3.2/3.3

The Twyman Green interferometer sensor µPhase® is available in identical designs for different resolutions and can be integrated into your setup.

  • Focusing and adjustment of surface reflectivity is possible (µPhase® 3.3 only)
  • Integration in manufacturing machines and production lines is possible


Technical Data µPhase® Sensor