µPhase® VERTICAL 3

µPhase® VERTICAL 3



Highly flexible and fully equipped interferometer system for manufacturing, workshops and laboratories

  • Motorized vertical Z-axis
  • Unique design for all types of reflection and transmission measurements
  • Integrated automatic radius measurement
  • Compact design with vertical measurement structure for small spaces
  • Optimal sample alignment due to integrated tilt and X-Y translation table
  • Modular design for optimization based on measurement requirements
  • Optional: Use of a tray holder and a motorized X-Y carriage for the automatic surface and radius measurement of many samples in one pass