µPhase® ST / ST+R

µPhase® ST / ST+R

Flexible and cost-efficient


µPhase® ST/ST+R can be used flexibly and cost-effectively in research and development as well as in production.

  • Measurement of flat and spherical samples
  • Compact table top stand for vertical measurements with small footprint
  • Optimal sample alignment with integrated tip/tilt and xy translation stage
  • Vertical axis with rough and fine regulation for high-precision adjustment
  • Optional: digital measurement unit for radius